Nu Instruments | Measuring High Purity Metals with Astrum GD-MS Abundance Sensitivity
This application note explores how the Astrum GD-MS achieves exceptional abundance sensitivity for analysing ultra-pure metals. It explains how improved ion filtering and instrument design reduce peak tailing, delivering enhanced detection limits for trace impurities in semiconductor materials.
Glow discharge mass spectrometry (GD-MS) is widely used for detecting trace impurities in solid materials, particularly ultra-pure metals used in semiconductor applications. At extremely low concentrations, distinguishing true impurities from molecular interference becomes difficult. High resolution and improved abundance sensitivity are therefore essential to achieve reliable results.
Abundance sensitivity refers to the degree of peak tailing from high-intensity ions into adjacent mass positions. Poor sensitivity makes it harder to detect small analyte peaks near large matrix signals. The Astrum GD-MS addresses this through advanced electrostatic filtering and ion optics, reducing contributions from slower ions and improving baseline separation.
The Astrum instrument combines proven GD-MS design principles with modern advancements in vacuum systems, electronics and sample handling. Experimental testing using a high-purity copper sample demonstrated strong performance, achieving an abundance sensitivity of 26 ppb. This enables ultra-trace detection and supports analysis of the highest purity materials with minimal background interference.
Key Takeaways:
- The Astrum GD-MS achieves abundance sensitivity as low as 26 ppb for copper measurements.
- Improved ion filtering reduces peak tailing and enhances trace element detection.
- Optimised instrument design supports ultra-trace analysis in high purity metal applications.
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